SIASUN TSS-3000 EFEM (TSS-3000)

BRAND:  
SIASUN
PART #:  
TSS-3000
ORIGIN:  
China
Estado de existencias:  
Disponible
AVAILABILITY:  
SUBJECT TO AVAILABILITY
Product Code:  
SIASUN-TSS-3000
Cleaning Robot - Small footprint, dual-arm robot with external axis, high transfer efficiency. EFEM is a front-end wafer transfer device and an interface system compatible with SEMI standards. It can transfer wafers manually or in conjunction with MR or OHT carrying levels. (TSS-3000)
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MARCASIASUN
PARTE #TSS-3000
SIASUN TSS-3000 EFEM (TSS-3000)

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